Conference paper
Inorganic electret with enhanced charge stability for energy harvesting
Department of Micro- and Nanotechnology, Technical University of Denmark1
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Physics, Technical University of Denmark3
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark4
We report a new surface treatment of inorganic electret materials which enhances the charge stability. Coating the surfaces with 1H, 1H, 2H, 2H - perfluorodecyltrichlorosilane (FDTS) makes the electret surface more hydrophobic which improves the surface charge stability under high humidity conditions.
Thermal tests show that the thermal stability of charge in the inorganic electrets is also much better than that of polymer materials such as CYTOP. A demonstrator device with SiO2 electrets shows promising results for energy harvesting applications.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2013 |
| Pages: | 207-210 |
| Proceedings: | 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems |
| ISBN: | 1467363502 , 1467363510 , 1467363529 , 9781467363501 , 9781467363518 and 9781467363525 |
| Types: | Conference paper |
| DOI: | 10.1109/NEMS.2013.6559716 |
| ORCIDs: | Hansen, Ole |
