Conference paper
Fabrication of an all-metal atomic force microscope probe
This paper presents a method for fabrication of an all-metal atomic force microscope probe (tip, cantilever and support) for optical read-out, using a combination of silicon micro-machining and electroforming. The paper describes the entire fabrication process for a nickel AFM-probe. In addition the first measurements with the new probe are presented
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 1997 |
| Pages: | 463-466 |
| Proceedings: | International Conference on Solid-state Sensors and Actuators (Transducers 1997) |
| ISBN: | 0780338294 and 9780780338296 |
| Types: | Conference paper |
| DOI: | 10.1109/SENSOR.1997.613686 |
| ORCIDs: | Hansen, Ole |
AFM Atom optics Atomic force microscopy Ni AFM-probe Nickel Optical device fabrication Optical films Optical microscopy Optical sensors Probes Resists STM Si micromachining Silicon atomic force microscope probe atomic force microscopy cantilever electroforming electroplating elemental semiconductors fabrication micromachining microsensors optical read-out silicon thermal expansion thick resist tip
