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1 Book chapter

„Electrical characterization of ultra-thin oxides grown on silicon surfaces cleaned in ultra-high vacuum"

Petersen, Christian Leth; Grey, Francois

Materials Research Society Symposium Proceedings 477 — 1997, pp. 293-298

Year: 1997

Language: English

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2 Journal article

Electrical Characterization of Ultra-Thin Oxides Grown on Silicon Surfaces Cleaned in Ultra-High Vacuum

Petersen, C. L.; Grey, F.

Mrs Online Proceedings Library — 1997, Volume 477, Issue 1, pp. 293-298

We have investigated the oxidation of clean reconstructed silicon surfaces in-situ using a fourpoint probe technique. The measured conductance variations, on Si(111) and Si(100) surfaces as a function of oxygen exposure are markedly different. On Si(100) surfaces, the conductance displays a rapid

Year: 1997

Language: English

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