Journal article
Suspended channel MEMS fabrication process for advanced device design and Bio-analytical functionalization
In
Microelectronic Engineering
—
2008, Volume 85, Issue 11, pp. 2290-2298
Abstract
This paper reports a simple and novel process that allows the fabrication of suspended channel MEMS devices. Two basic types of suspended structures were fabricated using the new process, and a possible functionalization mechanism for bio-analytical detection and sensing using spotting and capillary action was successfully tested.Possible uses of the fabricated structures are described, as specific existing types of biochemical MEMS sensors.
| Language: | English |
|---|---|
| Year: | 2008 |
| Pages: | 2290-2298 |
| ISSN: | 18735568 and 01679317 |
| Types: | Journal article |
| DOI: | 10.1016/j.mee.2008.07.015 |
