Journal article
Transition from linear to nonlinear sputtering of solid xenon
Self-sputtering of solid xenon has been studied with molecular dynamics simulations as a model system for the transition from dominantly linear to strongly nonlinear effects. The simulation covered the projectile energy range from 20 to 750 eV. Within a relatively narrow range from 30 to 250 eV, nonlinear features such as high collision densities in the sputtering volume, amorphization of the crystalline structure, and an enhanced emission of low-energy atoms occur gradually.
Language: | English |
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Publisher: | American Physical Society |
Year: | 1995 |
Pages: | 1407-1410 |
ISBN: | 3030831051 , 303083106X , 303083106x , 9783030831059 and 9783030831066 |
ISSN: | 10797114 and 00319007 |
Types: | Journal article |
DOI: | 10.1103/PhysRevLett.75.1407 |
ORCIDs: | Schou, Jørgen |