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Journal article

Transition from linear to nonlinear sputtering of solid xenon

From

Risø National Laboratory for Sustainable Energy, Technical University of Denmark1

Self-sputtering of solid xenon has been studied with molecular dynamics simulations as a model system for the transition from dominantly linear to strongly nonlinear effects. The simulation covered the projectile energy range from 20 to 750 eV. Within a relatively narrow range from 30 to 250 eV, nonlinear features such as high collision densities in the sputtering volume, amorphization of the crystalline structure, and an enhanced emission of low-energy atoms occur gradually.

Language: English
Publisher: American Physical Society
Year: 1995
Pages: 1407-1410
ISBN: 3030831051 , 303083106X , 303083106x , 9783030831059 and 9783030831066
ISSN: 10797114 and 00319007
Types: Journal article
DOI: 10.1103/PhysRevLett.75.1407
ORCIDs: Schou, Jørgen

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