Conference paper
Tailoring nonlinear dynamics of microbeam resonators with electrostatic actuation
Solid Mechanics, Department of Mechanical Engineering, Technical University of Denmark1
Department of Mechanical Engineering, Technical University of Denmark2
Department of Wind Energy, Technical University of Denmark3
Wind turbine loads & control, Department of Wind Energy, Technical University of Denmark4
Michigan State University5
We have developed an efficient shape optimization procedure for tailoring the nonlinear dynamic performance of microbeam resonators with electrostatic excitation. By relatively simple modifications of the cross-sectional dimensions along the length of the beam we demonstrate a considerable degree of control over the characteristic cubic nonlinear coefficient, allowing e.g. for extending the linear range of operation for resonant MEMS devices, which is important for improving signal-to-noise and other performance metrics.
| Language: | English |
|---|---|
| Year: | 2016 |
| Proceedings: | 24th International Congress of Theoretical and Applied Mechanics |
| Types: | Conference paper |
| ORCIDs: | Jensen, Jakob Søndergaard and Dou, Suguang |
