Journal article
Interference diagnostics of surfaces
Optical Diagnostics and Information Processing, Optics and Plasma Research Department, Risø National Laboratory for Sustainable Energy, Technical University of Denmark1
Optics and Plasma Research Department, Risø National Laboratory for Sustainable Energy, Technical University of Denmark2
Risø National Laboratory for Sustainable Energy, Technical University of Denmark3
The optical correlation technique for diagnostics of a rough surface with large surface inhjmogeneities by determining the transformations of the longitudinal coherence function of the field scattered by such surface are substantiated and implemented. The algorithm of computer processing of the interferograms for reconstruction of the relief of regular surfaces with resolution 0.5 nm is represented.
Language: | English |
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Publisher: | Allerton Press, Inc. |
Year: | 2007 |
Pages: | 269-280 |
Journal subtitle: | (information Optics) |
ISSN: | 19347898 and 1060992x |
Types: | Journal article |
DOI: | 10.3103/S1060992X07040108 |
ORCIDs: | Hanson, Steen Grüner |