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10 items by relevance
1 Journal article

Novel resonant cantilever mass change detection and resonant frequency tuning

Grigorov, Alexander; Boisen, Anja

Microelectronic Engineering — 2005, Volume 78-79, pp. 190-194

This paper reports a novel way to detect the resonant frequency of an electro-thermally actuated cantilever sensor that we have previously reported, in order to perform mass detection by resonant frequency shift detection. The device is based on monitoring the rupture of a clamped cantilever

Year: 2005

Language: English

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2 Conference paper

Novel Resonant cantilever mass change detection and resonant frequency tuning

Grigorov, Alexander; Boisen, Anja

Proceedings of Mne 2004 — 2004, pp. 228-229

Year: 2004

Language: English

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