Conference paper
Laser self-mixing interferometry in VCSELs - an ultra-compact and massproduceable deflection detection system for nanomechanical polymer cantilever sensors
Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark1
Department of Photonics Engineering, Technical University of Denmark2
Quantum and Laser Photonics, Department of Photonics Engineering, Technical University of Denmark3
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
Department of Micro- and Nanotechnology, Technical University of Denmark6
We have realised an ultra-compact deflection detection system based on laser self-mixing interferometry in a Vertical-Cavity Surface-Emitting Laser (VCSEL). The system can be used together with polymer nanomechanical cantilevers to form chemical sensors capable of detecting less than 1nm deflection.
| Language: | English |
|---|---|
| Year: | 2008 |
| Proceedings: | International Workshop on Nanomechanical Cantilever Sensors |
| Types: | Conference paper |
| ORCIDs: | Yvind, Kresten , Hvam, Jørn Märcher and Boisen, Anja |
