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Advances in the chemical vapor deposition (CVD) of Tantalum

By Christensen, Erik1,2; Petrushina, Irina1,2; Mugabi, James Atwoki1,2; Bjerrum, Niels1,2; Eriksen, Søren3

From

Department of Energy Conversion and Storage, Technical University of Denmark1

Proton conductors, Department of Energy Conversion and Storage, Technical University of Denmark2

Tantaline A/S3

Language: English
Year: 2014
Proceedings: 247th ACS National Meeting
Types: Other
ORCIDs: 0000-0003-3265-3121 , 0000-0002-4327-3039 and 0000-0001-7241-4091

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