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Conference paper

Silicon Rich Nitride Micro-resonators for optical filters

By Dyvelkov, Karin Nordström1,2; Svendsen, Winnie Edith3,4,5; Philipp, Hugh Taylor2

From

Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Photonics Engineering, Technical University of Denmark2

Nano-Bio Integrated Systems Group, Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3

Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark4

Department of Micro- and Nanotechnology, Technical University of Denmark5

Language: English
Year: 2003
Proceedings: Danish Physical Society annual meeting 2003
Types: Conference paper
ORCIDs: Svendsen, Winnie Edith

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