Journal article
Error sources in atomic force microscopy for dimensional measurements: Taxonomy and modeling
This paper aimed at identifying the error sources that occur in dimensional measurements performed using atomic force microscopy. In particular, a set of characterization techniques for errors quantification is presented. The discussion on error sources is organized in four main categories: scanning system, tip-surface interaction, environment, and data processing.
The discussed errors include scaling effects, squareness errors, hysteresis, creep, tip convolution, and thermal drift. A mathematical model of the measurement system is eventually described, as a reference basis for errors characterization, with an applicative example on a reference silicon grating.
Copyright © 2010 by ASME.
Language: | English |
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Year: | 2010 |
Pages: | 0309031-0309038 |
ISSN: | 15288935 and 10871357 |
Types: | Journal article |
DOI: | 10.1115/1.4001242 |
ORCIDs: | De Chiffre, Leonardo |