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Journal article

Longitudinal bulk acoustic mass sensor

By Hales, Jan Harry1,2,3; Teva, Jordi3; Boisen, Anja2,3,4; Davis, Zachary James1,2,3

From

Dynamic NEMS Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1

NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2

Department of Micro- and Nanotechnology, Technical University of Denmark3

Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4

A polycrystalline silicon longitudinal bulk acoustic cantilever is fabricated and operated in air at 51 MHz. A mass sensitivity of 100 Hz/fg (1 fg=10(-15) g) is obtained from the preliminary experiments where a minute mass is deposited on the device by means of focused ion beam. The total noise in the currently applied measurement system allows for a minimum detectable mass of 0.5 fg in air.

Language: English
Publisher: American Institute of Physics
Year: 2009
Pages: 033506
ISSN: 10773118 and 00036951
Types: Journal article
DOI: 10.1063/1.3168519
ORCIDs: Boisen, Anja
Keywords

bulk acoustic wave devices cantilevers elemental semiconductors focused ion beam technology mass measurement silicon

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