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Conference paper

Simple electrodynamic transduction scheme for micromechanical resonators

By Kurek, Maksymilian1,2; Larsen, Peter Emil1,2; Schmid, Silvan1,2; Boisen, Anja1,2

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2

Language: English
Year: 2015
Proceedings: 41st International conference on Micro and Nano Engineering
Types: Conference paper
ORCIDs: Schmid, Silvan and Boisen, Anja

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