Journal article
Nanostructures for all-polymer microfluidic systems
Polymer Microsystems for Cell Processing Group, Polymer Micro and Nano Engineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
Polymer Micro and Nano Engineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Theoretical Microfluidics Group, Theory Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
Theory Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50 nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially.
Arrays of holes of 50 nm diameter/35 nm depth and 100 nm/100 nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.
| Language: | English |
|---|---|
| Year: | 2010 |
| Pages: | 1379-1382 |
| ISSN: | 18735568 and 01679317 |
| Types: | Journal article |
| DOI: | 10.1016/j.mee.2009.11.167 |
| ORCIDs: | Bruus, Henrik and Larsen, Niels Bent |
