Journal article
Fabrication of Ni stamp with high aspect ratio, two-leveled, cylindrical microstructures using dry etching and electroplating
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2
Biomaterial Microsystems, Department of Micro- and Nanotechnology, Technical University of Denmark3
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4
Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Department of Health Technology, Technical University of Denmark5
We describe a process for the fabrication of a Ni stamp that is applied to the microstructuring of polymers by hot embossing. The target devices are microcontainers that have a potential application in oral drug delivery. Each container is a 3D, cylindrical, high aspect ratio microstructure obtained by defining a reservoir and a separating trench with different depths of 85 and 125 μm, respectively, in a single embossing step.
The fabrication of the required two leveled stamp is done using a modified DEEMO (dry etching, electroplating and molding) process. Dry etching using the Bosch process and electroplating are optimized to obtain a stamp with smooth stamp surfaces and a positive sidewall profile. Using this stamp, hot embossing is performed successfully with excellent yield and high replication fidelity.
Language: | English |
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Publisher: | IOP Publishing |
Year: | 2015 |
Pages: | 055021 |
ISSN: | 13616439 and 09601317 |
Types: | Journal article |
DOI: | 10.1088/0960-1317/25/5/055021 |
ORCIDs: | Petersen, Ritika Singh , Keller, Stephan Sylvest and Boisen, Anja |