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Conference paper

Extraction of positive and negative ion beams by discrete and modal focusing effects and their applications for surface processing

In Abstract Booklet — 2011, pp. 11-11

By Stamate, Eugen1,2

From

Risø National Laboratory for Sustainable Energy, Technical University of Denmark1

Plasma Physics and Technology Programme, Risø National Laboratory for Sustainable Energy, Technical University of Denmark2

Language: English
Year: 2011
Pages: 11-11
Proceedings: Innovation in thin film processing and characterization and Magnetron ion processing and arc technologies European conference
Types: Conference paper
ORCIDs: Stamate, Eugen

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