Journal article · Preprint article
Single-layer graphene on silicon nitride micromembrane resonators
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2
University of Copenhagen3
National Institute of Standards and Technology4
Harvard University5
Technical University of Denmark6
Massachusetts Institute of Technology7
Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect for exciting new devices, such as optoelectromechanical transducers.
Here, we add a single-layer graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene covered membranes is found to be equal to a perfectly conductive membrane, without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of pure SiN micromembranes.
The concept of graphene-SiN resonators allows a broad range of new experiments both in applied physics and fundamental basic research, e.g., for the mechanical, electrical, or optical characterization of graphene.
Language: | English |
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Publisher: | American Institute of Physics |
Year: | 2014 |
Pages: | 054513 |
ISSN: | 10897550 and 00218979 |
Types: | Journal article and Preprint article |
DOI: | 10.1063/1.4862296 |
ORCIDs: | 0000-0002-1206-6862 , 0000-0003-1337-9163 , 0000-0001-9859-6591 , Schmid, Silvan and Boisen, Anja |