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title:('No AND blue' AND LED AND solution AND for AND photolithography AND room AND illumination)

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1 Article

'No blue' LED solution for photolithography room illumination

This paper explored the feasibility of using a LED-based bulb as the illumination light source for photolithography room. A no-blue LED was designed, and the prototype was fabricated. The spectral power distribution of both the LED bulb and the yellow fluorescent tube was measured. Based on that

Year: 2010

Language: Undetermined

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2 Book chapter

'No blue' LED solution for photolithography room illumination

This paper explored the feasibility of using a LED-based bulb as the illumination light source for photolithography room. A no-blue LED was designed, and the prototype was fabricated. The spectral power distribution of both the LED bulb and the yellow fluorescent tube was measured. Based on that

Year: 2010

Language: English

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