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10 items by relevance
1 Journal article

Pulse Reversal PermAlloy Plating Process for MEMS Applications

Smistrup, Kristian; Tang, Peter; Mller, Per

Ecs Meeting Abstracts — 2006, Volume MA2006-02, Issue 36, pp. 1673-1673

Year: 2006

Language: Undetermined

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pganmh of dic jkbel
2 Journal article · Conference paper

Pulse Reversal PermAlloy Plating Process for MEMS Applications

Smistrup, Kristian; Tang, Peter Torben; Møller, Per

E C S Transactions — 2007, Volume 3, Issue 25, pp. 179-189

deposits.We demonstrate selected MEMS applications of the electrolyte.The use of the strong complexing agent 5-sulfosalicylic acidallows for a photometric determination of the Fe3+-level in thebath and eliminate precipitates. This makes the electrolytesuitable as a Permalloy plating process used

Year: 2007

Language: English

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cgjdbmi lfnhkp aoe
3 Conference paper

Pulse Reversal PermAlloy Plating Process for MEMS Applications

Smistrup, Kristian; Tang, Peter Torben; Møller, Per

Meeting Abstracts - Electrochemical Society — 2006

Year: 2006

Language: English

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dhg iafb cn lmejopk

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