Conference paper
Roughness measurements with an AFM-CMM instrument
In
Proc. of 5th Euspen International Conference
—
2005
Abstract
In this paper, application of a Large Range AFM to roughness analyses is presented: measurements on different calibration standards covering a range of 4.8×0.1 mm2 were performed. Upon extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards.
Profiles from the Large range AFM were directly compared with those obtained by a traceable stylus instrument, resulting from probing the same surface region.
| Language: | English |
|---|---|
| Year: | 2005 |
| Proceedings: | 5th International Conference of the European Society for Precision Engineering and Nanotechnology |
| Types: | Conference paper |
| ORCIDs: | De Chiffre, Leonardo and Hansen, Hans Nørgaard |
Keywords
