Conference paper
Plasma assisted RF sputtering of lithium phosphorous oxynitride thin films for all-solid-state lithium ion batteries
Department of Energy Conversion and Storage, Technical University of Denmark1
Electrofunctional materials, Department of Energy Conversion and Storage, Technical University of Denmark2
Atomic Scale Materials Modelling, Department of Energy Conversion and Storage, Technical University of Denmark3
Fundamental Electrochemistry, Department of Energy Conversion and Storage, Technical University of Denmark4
Language: | English |
---|---|
Year: | 2013 |
Proceedings: | 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials |
Types: | Conference paper |
ORCIDs: | Stamate, Eugen and Holtappels, Peter |