Conference paper
Fabrication of high-Q, high-confinement 4H-SiC microring resonators by surface roughness reduction
Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark1
Centre of Excellence for Silicon Photonics for Optical Communications, Centers, Technical University of Denmark2
Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark3
Department of Photonics Engineering, Technical University of Denmark4
Chinese Academy of Sciences5
Fiber Optics, Devices and Non-linear Effects, Department of Photonics Engineering, Technical University of Denmark6
University of Copenhagen7
We improve the Q of SiC microring resonators with a sub-micron cross-sectional dimension by a factor of six by reducing surface roughness. We achieve a high Q (~73,000) for such a device with anomalous dispersion.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2019 |
| Edition: | The Optical Society of America |
| Pages: | 1-2 |
| Proceedings: | 2019 CLEO Conference & Exhibition |
| Series: | Conference on Lasers and Electro-optics |
| ISBN: | 1728137187 , 194358057X , 194358057x , 9781728137186 and 9781943580576 |
| ISSN: | 21609047 and 21609020 |
| Types: | Conference paper |
| DOI: | 10.1364/CLEO_SI.2019.SM2O.7 |
| ORCIDs: | 0000-0003-1409-6974 , 0000-0003-2739-9544 , Pu, Minhao and Ou, Haiyan |
