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Journal article

Fabrication of 3D nano/microelectrodes via two-photon-polymerization

By Abaddi, Mohammed Al-; Sasso, Luigi1; Dimaki, Maria1,2; Svendsen, Winnie E.1,2; Dieter Kern, Johann-Peter Reithmaier, Olaf Kruger, Uwe Zeitner, Martin Hoffmann, Martin Stelzle

From

Nano Bio Integrated Systems, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

The integration of two-photon polymerization technology with standard microfabrication techniques is imperative for the use of this tool in micro- and nanotechnology and especially for the future commercialization of the technology. In this work, we report a novel method for the fabrication of 3D polymeric structures via a two-photon polymerization based system.

The method consists of combining a two-photon polymerization system with conventional photolithography techniques in order to create 3D polymer electrodes. The functionality of the final structures was confirmed by electrochemical characterization techniques.

Language: English
Year: 2012
Pages: 378-381
Proceedings: 37th International Conference on Micro and Nano Engineering
ISSN: 18735568 and 01679317
Types: Journal article
DOI: 10.1016/j.mee.2012.07.015
ORCIDs: Dimaki, Maria and Svendsen, Winnie E.
Keywords

3D Electrodes Micro-fabrication Three-dimensional Micro/Nanostructures Two-photon polymerization

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