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Conference paper

Characterization and optimal design of nonlinear MEMS resonators

By Dou, Suguang1; Strachan, B.S.2; Shaw, S.W.2; Jensen, Jakob Søndergaard3,4

From

Department of Mechanical Engineering, Technical University of Denmark1

Michigan State University2

Department of Electrical Engineering, Technical University of Denmark3

Acoustic Technology, Department of Electrical Engineering, Technical University of Denmark4

Language: English
Year: 2014
Proceedings: Solid-State Sensors, Actuators and Microsystems Workshop
Types: Conference paper
ORCIDs: Dou, Suguang and Jensen, Jakob Søndergaard

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Analysis