Conference paper
Nanometrology using localized surface plasmon resonance spectroscopy
Department of Photonics Engineering, Technical University of Denmark1
Danish Technological Institute2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Optofluidics, Department of Micro- and Nanotechnology, Technical University of Denmark4
Structured Electromagnetic Materials, Department of Photonics Engineering, Technical University of Denmark5
A novel optical characterization technique called localized surface plasmon resonance (LSPR) spectroscopy is presented. LSPR spectroscopy exploits light excited surface plasmons, which are collective coherent electron oscillations at a metal/dielectric interface. The LSPR can be observed in a transmission spectrum and it is very sensitive to the constituent materials as well as both lateral and vertical dimensions of the structures.
This makes LSPR spectroscopy interesting for a number of applications including nanometrology. Like scatterometry, LSPR spectroscopy requires test structures and computer simulations to establish the correlation between spectra and physical dimensions. Instead of measuring on individual structures like CD-SEM and AFM, LSPR spectroscopy measures on an array of test structures with an arbitrary array size.
This makes LSPR spectroscopy particularly interesting for dense device layers where the vacant space for test structures is limited.In this work, LSPR spectroscopy is used to evaluate a fabrication process including imprinting, etching and metallisation of gammadion test structures distributed on a 4” wafer.
Language: | English |
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Publisher: | IEEE |
Year: | 2013 |
Pages: | 1-1 |
Proceedings: | Conference on Lasers and Electro-Optics Europe 2013 (CLEO Europe) |
ISBN: | 1479905933 , 1479909602 , 1557529736 , 9781479905935 , 9781479909605 , 9781557529732 , 1479905925 , 1479905941 , 9781479905928 and 9781479905942 |
Types: | Conference paper |
DOI: | 10.1109/CLEOE-IQEC.2013.6801236 |
ORCIDs: | Kristensen, Anders and Mortensen, N. Asger |
Aerospace Bioengineering Communication, Networking and Broadcast Technologies Components, Circuits, Devices and Systems Correlation Educational institutions Engineered Materials, Dielectrics and Plasmas Engineering Profession Fields, Waves and Electromagnetics General Topics for Engineers LSPR spectroscopy Nanotechnology Nuclear Engineering Photonics and Electrooptics Plasmons Power, Energy and Industry Applications Size measurement Spectroscopy Uncertainty collective coherent electron oscillations dense device layers etching fabrication process gammadion test structures imprinting light excited surface plasmons localized surface plasmon resonance spectroscopy metal-dielectric interface metallisation nanometrology optical characterization technique optical testing scatterometry spectroscopy surface plasmon resonance transmission spectrum