Journal article
Case studies of electrical characterisation of graphene by terahertz time-domain spectroscopy
Department of Physics, Technical University of Denmark1
Université Paris-Saclay2
Tianjin Normal University3
Chinese Academy of Sciences4
Institute for Basic Science5
Ulsan National Institute of Science and Technology6
Aixtron SE7
Interuniversitair Micro-Elektronica Centrum8
Center for Nanostructured Graphene, Centers, Technical University of Denmark9
Graphenea10
Functional Oxides, Department of Energy Conversion and Storage, Technical University of Denmark11
Ultrafast Infrared and Terahertz Science, Department of Photonics Engineering, Technical University of Denmark12
Department of Energy Conversion and Storage, Technical University of Denmark13
Department of Photonics Engineering, Technical University of Denmark14
Thales15
Nanomaterials and Devices, Department of Physics, Technical University of Denmark16
Italian Institute of Technology17
Technical University of Denmark18
Warsaw University of Technology19
Aalto University20
...and 10 moreGraphene metrology needs to keep up with the fast pace of developments in graphene growth and transfer. Terahertz time-domain spectroscopy (THz-TDS) is a non-contact, fast, and non-destructive characterization technique for mapping the electrical properties of graphene. Here we show several case studies of graphene characterization on a range of different substrates that highlight the versatility of THz-TDS measurements and its relevance for process optimization in graphene production scenarios.
Language: | English |
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Year: | 2021 |
ISSN: | 20531583 |
Types: | Journal article |
DOI: | 10.1088/2053-1583/abdbcb |
ORCIDs: | Whelan, Patrick R. , Shivayogimath, Abhay , 0000-0003-1114-2955 , 0000-0001-5696-8991 , 0000-0003-0270-0417 , 0000-0001-6043-7130 , 0000-0002-8939-3175 , 0000-0002-8134-7633 , 0000-0001-8442-2283 , Bøggild, Peter , Zhou, Binbin , Booth, Tim , Petersen, Dirch Hjorth and Jepsen, Peter Uhd |