Journal article
Investigation of Top/Bottom electrode and Diffusion Barrier Layer for PZT Thick Film MEMS Sensors
In
Ferroelectrics
—
2008, Volume 367, Issue 1, pp. 201-213
Abstract
Top and bottom electrodes for screen printed piezoelectric lead zirconate titanate, Pb(ZrxTi1 - x)O3 (PZT) thick film are investigated with respect to future MEMS devices. Down to 100 nm thick E-beam evaporated Al and Pt films are patterned as top electrodes on the PZT using a lift-off process with a line width down to 3 μ m.
A 700 nm thick ZrO2 layer as insolating diffusion barrier layer is found to be insufficient as barrier layer for PZT on a silicon substrate sintered at 850°C. EDX shows diffusion of Si into the PZT layer.
| Language: | English |
|---|---|
| Publisher: | Informa UK Limited |
| Year: | 2008 |
| Pages: | 201-213 |
| ISSN: | 15635112 , 00150193 and 10267484 |
| Types: | Journal article |
| DOI: | 10.1080/00150190802375441 |
| ORCIDs: | Pedersen, Thomas and Thomsen, Erik Vilain |
