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Conference paper

Organic ice resists: condensed small molecules as spin-free volatile E-beam resists

By Tiddi, William1; Lê Thanh, Hoà1,2,3; Elsukova, Anna1,4; Beleggia, Marco1,4; Han, Anpan1

From

DTU Danchip, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark3

Center for Electron Nanoscopy, Technical University of Denmark4

Language: English
Year: 2017
Proceedings: 43rd International conference on Micro and Nano Engineering
Types: Conference paper
ORCIDs: Tiddi, William , Lê Thanh, Hoà , Beleggia, Marco and Han, Anpan
Keywords

Condensed films Electron-beam lithography Negative organic resist

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