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Conference paper

Pyrolytic carbon for MEMS string resonantors

By Nguyen, Quang Long1,2; Larsen, Peter Emil1,2,3; Boisen, Anja1,2,3; Keller, Stephan Sylvest1,2,4

From

Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Department of Health Technology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark3

Biomaterial Microsystems, Department of Micro- and Nanotechnology, Technical University of Denmark4

Language: English
Year: 2018
Proceedings: International Conference on Expanding Frontiers of Carbon MEMS
Types: Conference paper
ORCIDs: Boisen, Anja and Keller, Stephan Sylvest

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