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Conference paper

Nanoimprint lithography in Topas, a highly UV-transparent and chemically reisistant thermoplast

In Conference Digests of the Ieee Sponsored Conference on Nanoscale Devices & System Integration (ndsi) — 2004
From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Language: English
Year: 2004
Types: Conference paper
ORCIDs: Shi, Peixiong and Kristensen, Anders

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