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Boolean: (bicycle AND helmet) OR (head AND protection) (always group AND in parenthesis)
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10 items by relevance
1 Conference paper

Quality Control of JEOL JBX-9500 E-beam Lithography System in a Multi-User Laboratory

Greibe, Tine; Anhøj, Thomas Aarøe; Han, Anpan; Johansen, Leif

Year: 2015

Language: English

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ek d lgpbhojnf iacm
2 Journal article

Quality control of JEOL JBX-9500FSZ e-beam lithography system in a multi-user laboratory

Greibe, Tine; Anhøj, Thomas Aarøe; Johansen, Leif; Han, Anpan

Microelectronic Engineering — 2016, Volume 155, pp. 25-28

Consistent results on an electron beam lithography instrument pose a major challenge in multi-user open-access nanofabrication laboratories. Calibration can be done using special and dedicated instruments, however, this is time consuming and expensive. We address this challenge by a carefully

Year: 2016

Language: English

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el ahdj cbkpfm inog

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