Journal article
SU-8 Cantilever Sensor System with Integrated Readout
In
Sensors and Actuators A. Physical
—
2005, Volume 123-124, Issue 123-124, pp. 111-115
Abstract
We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors.
High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols.
| Language: | English |
|---|---|
| Year: | 2005 |
| Pages: | 111-115 |
| ISSN: | 18733069 and 09244247 |
| Types: | Journal article |
| DOI: | 10.1016/j.sna.2005.03.025 |
| ORCIDs: | Boisen, Anja |
