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title:(Dimensional AND micro AND and AND nano AND metrology)
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Conference paper · Journal article
Dimensional micro and nano metrology 10.1016/j.cirp.2006.10.005
C I R P Annals — 2006, Volume 55, Issue 2, pp. 721-743
The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer
Year: 2006
Language: English
