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Boolean: (bicycle AND helmet) OR (head AND protection) (always group AND in parenthesis)
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10 items by relevance
1 Journal article

Tantalum oxide films as protective coatings for sensors

Christensen, Carsten; Reus, Roger De; Bouwstra, Siebe

Journal of Micromechanics and Microengineering — 1999, Volume 9, Issue 2, pp. 113-18

Year: 1999

Language: English

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2 Journal article

Tantalum oxide thin films as protective coatings for sensors

Christensen, Carsten; Reus, Roger De; Bouwstra, Siebe

Journal of Micromechanics and Microengineering — 1999, Volume 9, Issue 2, pp. 113-118

Reactively sputtered tantalum oxide thin films have been investigated as protective coatings for aggressive media exposed sensors. Tantalum oxide is shown to be chemically very robust. The etch rate in aqueous potassium hydroxide with pH 11 at 140°C is lower than 0.008 Å h-l. Etching in liquids

Year: 1999

Language: English

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