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title:(Sodium AND distribution AND in AND thin-film AND anodic AND bonding)

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1 Conference paper

Sodium distribution in thin-film anodic bonding

Visser, M. M.; Weichel, Steen; Storaas, P.; Reus, Roger De; Hanneborg, A. B.

Proceedings of Eurosensors Xiv — 2000, pp. 435-438

Year: 2000

Language: English

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2 Journal article

Sodium distribution in thin-film anodic bonding

Depth profiles of the sodium distribution at bonded interfaces of silicon wafers, bonded with an intermediate borosilicate glass film, are recorded by secondary ion mass spectrometry (SIMS). A layer of dielectric material is present under the thin layer of glass, either a layer of silicon oxide

Year: 2000

Language: English

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