Conference paper
Fabrication of antireflective SiC surface using plasma etching with self‐assembled nanopattern
Department of Photonics Engineering, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark3
Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark4
Language: | English |
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Year: | 2013 |
Proceedings: | 39th International Conference on Micro and Nano Engineering |
Types: | Conference paper |
ORCIDs: | Ou, Yiyu , Argyraki, Aikaterini and Ou, Haiyan |