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Conference paper

Fabrication of antireflective SiC surface using plasma etching with self‐assembled nanopattern

From

Department of Photonics Engineering, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark3

Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark4

Language: English
Year: 2013
Proceedings: 39th International Conference on Micro and Nano Engineering
Types: Conference paper
ORCIDs: Ou, Yiyu , Argyraki, Aikaterini and Ou, Haiyan

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