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Conference paper

Micro Hall effect metrology

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark2

Surface Physics and Catalysis, Department of Physics, Technical University of Denmark3

Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark4

Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark5

Magnetic Systems, Department of Micro- and Nanotechnology, Technical University of Denmark6

Technical University of Denmark7

Interuniversitair Micro-Elektronica Centrum8

Language: English
Year: 2012
Proceedings: International Conference on Ion Implantation Technology
Types: Conference paper
ORCIDs: Petersen, Dirch Hjorth , Hansen, Ole and Bøggild, Peter

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