Conference paper
Micro Hall effect metrology
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark2
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark3
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark4
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark5
Magnetic Systems, Department of Micro- and Nanotechnology, Technical University of Denmark6
Technical University of Denmark7
Interuniversitair Micro-Elektronica Centrum8
Language: | English |
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Year: | 2012 |
Proceedings: | International Conference on Ion Implantation Technology |
Types: | Conference paper |
ORCIDs: | Petersen, Dirch Hjorth , Hansen, Ole and Bøggild, Peter |