Journal article · Conference paper
Topology optimized electrothermal polysilicon microgrippers
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Solid Mechanics, Department of Mechanical Engineering, Technical University of Denmark4
Department of Mechanical Engineering, Technical University of Denmark5
This paper presents the topology optimized design procedure and fabrication of electrothermal polysilicon microgrippers for nanomanipulation purposes. Performance of the optimized microactuators is compared with a conventional three-beam microactuator design through finite element analysis. The accuracy of the finite element model is verified by comparison of simulated and measured displacement vs. bias voltage curves.
A considerable improvement in the mechanical stiffness is indicated by AFM force measurements, being 9 times higher compared to the conventional three-beam actuator. (C) 2008 Elsevier B.V. All rights reserved.
| Language: | English |
|---|---|
| Year: | 2008 |
| Pages: | 1096-1099 |
| Proceedings: | 33rd International Conference on Micro- and Nano-Engineering |
| ISSN: | 18735568 and 01679317 |
| Types: | Journal article and Conference paper |
| DOI: | 10.1016/j.mee.2008.01.049 |
| ORCIDs: | Petersen, Dirch Hjorth , Mølhave, Kristian , Sigmund, Ole and Bøggild, Peter |
