Journal article
Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
MEMS-AppliedSensors, Department of Micro- and Nanotechnology, Technical University of Denmark3
Technical University of Denmark4
Meggitt A/S5
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark6
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark7
We describe the fabrication and characterization of a significantly improved version of a microelectromechanical system-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass; the harvester is fabricated in a fully monolithic process. The main advantage of bimorph vibration energy harvesters is that strain energy is not lost in mechanical support materials since only Pb(ZrxTi1-x)O3 (PZT) is strained; as a result, the effective system coupling coefficient is increased, and thus a potential for significantly higher output power is released.
In addition, when the two layers are connected in series, the output voltage is increased, and as a result the relative power loss in the necessary rectifying circuit is reduced. We describe an improved process scheme for the energy harvester, which resulted in a robust fabrication process with a record high fabrication yield of 98%.
The robust fabrication process allowed a high pressure treatment of the screen printed PZT thick films prior to sintering. The high pressure treatment improved the PZT thick film performance and increased the harvester power output to 37.1 μW at 1 g root mean square acceleration. We also characterize the harvester performance when only one of the PZT layers is used while the other is left open or short circuit.
Language: | English |
---|---|
Publisher: | IOP Publishing |
Year: | 2012 |
Pages: | 094007 |
Proceedings: | 11th International Workshop on Micro and Nanotechnology |
ISSN: | 13616439 and 09601317 |
Types: | Journal article |
DOI: | 10.1088/0960-1317/22/9/094007 |
ORCIDs: | Lei, Anders , Birkelund, Karen , Thomsen, Erik Vilain and Hansen, Ole |