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Ahead of Print article · Journal article

1060-nm Tunable Monolithic High Index Contrast Subwavelength Grating VCSEL

By Ansbæk, Thor1,2; Chung, Il-Sug1,3; Semenova, Elizaveta1,2; Yvind, Kresten1,2

From

Department of Photonics Engineering, Technical University of Denmark1

Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark2

Quantum and Laser Photonics, Department of Photonics Engineering, Technical University of Denmark3

We present the first tunable vertical-cavity surface-emitting laser (VCSEL) where the top distributed Bragg reflector has been completely substituted by an air-cladded high-index-contrast subwavelength grating (HCG) mirror. In this way, an extended cavity design can be realized by reducing the reflection at the semiconductor #x2013;air interface using an anti-reflective coating (ARC).

We demonstrate how the ARC can be integrated in a monolithic structure by oxidizing AlGaAs with high Al-content. The HCG VCSEL has the potential to achieve polarization stable single-mode output with high tuning efficiency. The HCG VCSEL shows a total tuning range of 16 nm around an emission wavelength of 1060 nm with 1-mW output power.

Language: English
Publisher: IEEE
Year: 2013
Pages: 365-367
ISSN: 19410174 and 10411135
Types: Ahead of Print article and Journal article
DOI: 10.1109/LPT.2012.2236087
ORCIDs: Ansbæk, Thor , Chung, Il-Sug , Semenova, Elizaveta and Yvind, Kresten
Keywords

III-V semiconductor materials Microelectromechanical systems Semiconductor lasers Vertical cavity surface emitting lasers

Other keywords

Cavity resonators Distributed Bragg reflectors Micromechanical devices Optical polarization Tuning microelectromechanical systems semiconductor lasers vertical cavity surface emitting lasers

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