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Conference paper

Sensivity study of micro four-point probe measurements on small samples

By Wang, Fei1,2,3; Petersen, Dirch Hjorth3,4,5; Hansen, Torben Mikael3; Henriksen, Toke Riishøj1,2,3; Bøggild, Peter3,4,5; Hansen, Ole1,2,3

From

Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark1

MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2

Department of Micro- and Nanotechnology, Technical University of Denmark3

Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4

NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark5

Language: English
Year: 2009
Proceedings: International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
Types: Conference paper
ORCIDs: Petersen, Dirch Hjorth , Bøggild, Peter and Hansen, Ole

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