PhD Thesis
Optical methods for characterization of surface structures on a nanometer scale
When studying a sample with subwavelength features using conventional microscopy, the diffraction limit sets a lower bound to the resolution achievable. In this work the possiblity of circumventing the diffraction limit by employing a scanning near-field optical microscope (SNOM) to perform the characterization is investigated.
Experimental SNOM images of the optical field distribution above a deep grating are analyzed with the purpose of identifying the grating topography, and transfer functions describing the coupling of the free-space field to the guided mode of the SNOM fiber are determined numerically.
Language: | English |
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Year: | 2007 |
Types: | PhD Thesis |
ORCIDs: | Gregersen, Niels |