Conference paper
Bidirectional electrostatic MEMS tunable VCSELs
Department of Photonics Engineering, Technical University of Denmark1
Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark2
Quantum and Laser Photonics, Department of Photonics Engineering, Technical University of Denmark3
Metamaterials, Department of Photonics Engineering, Technical University of Denmark4
Ultra-fast Optical Communication, Department of Photonics Engineering, Technical University of Denmark5
Centre of Excellence for Silicon Photonics for Optical Communications, Centers, Technical University of Denmark6
National Centre for Nano Fabrication and Characterization, Technical University of Denmark7
Bidirectional actuation using large voltages on the static electrodes allow linear tuning and reduction of AC voltage for stiff MEMS actuators. We use this to achieve 3.44% fractional bandwidth at 2.73 MHz, which results in a record-breaking one-way sweep-rate of fractional bandwidth (%) pr. μsec.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2021 |
| Pages: | 1-2 |
| Proceedings: | 27<sup>th</sup> International Semiconductor Laser Conference |
| ISBN: | 166544133X and 9781665441339 |
| ISSN: | 19476981 and 08999406 |
| Types: | Conference paper |
| DOI: | 10.1109/ISLC51662.2021.9615710 |
| ORCIDs: | Simonsen, Arnhold , Hansen, Søren Engelberth , Payandeh, Masoud , Marchevsky, Andrey , Kumar Sahoo, Hitesh , Semenova, Elizaveta , Hansen, Ole and Yvind, Kresten |
