Conference paper
Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nano-Bio Integrated Systems Group, Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Biomedical Micro Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark6
Center for Nanoteknologi, Centers, Technical University of Denmark7
We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g.
Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors.
An optimized design and fabrication process is presented.
Language: | English |
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Publisher: | IEEE |
Year: | 2009 |
Pages: | 873-877 |
Proceedings: | 8th IEEE Conference on Sensors |
ISBN: | 1424445485 , 1424453356 , 9781424445486 and 9781424453351 |
ISSN: | 21689229 , 21689237 and 19300395 |
Types: | Conference paper |
DOI: | 10.1109/ICSENS.2009.5398237 |
ORCIDs: | Mar, Mikkel Dysseholm , Hübner, Jörg , Hansen, Ole and Thomsen, Erik Vilain |