Conference paper
Novel four-point-probe design and nanorobotic dual endeffector strategy for electrical characterization of as-grown SWCNT bundles
University of Oldenburg1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
STMicroelectronics5
In this paper, a novel nanorobotic strategy for non-destructive and direct electrical characterization of as-grown bundles of single-walled carbon nanotubes (SWCNTs) is presented. For this purpose, test patterns of SWCNT bundles having different diameters are grown on a silicon substrate by chemical vapor deposition.
A new design of microstructured four-point-probes is proposed and fabricated allowing for direct contacting of vertically aligned bundles of SWCNTs. A nanorobotic setup is upgraded into a dual endeffector system to achieve good electrical contact between four-point-probe and SWCNT bundle and to perform electrical measurements.
First experimental results of non-destructive electrical characterization are presented and discussed.
| Language: | English |
|---|---|
| Year: | 2010 |
| Pages: | 4100-4105 |
| Proceedings: | 2010 IEEE International Conference on Robotics and Automation |
| ISBN: | 1424450381 , 1424450403 , 9781424450381 and 9781424450404 |
| ISSN: | 10504729 and 2577087x |
| Types: | Conference paper |
| DOI: | 10.1109/ROBOT.2010.5509952 |
| ORCIDs: | Bøggild, Peter |
Carbon nanotubes Chemical vapor deposition Conductivity Contacts Copper Electric variables measurement Electrical resistance measurement Integrated circuit interconnections Nanoelectronics Testing carbon nanotubes chemical vapor deposition direct electrical characterization electrical contact electrical contacts electrical measurement end effectors four-point-probe design micromanipulators microstructured four-point-probes nanorobotic dual end-effector strategy nondestructive electrical characterization silicon silicon substrate single-walled carbon nanotubes
