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Conference paper

Integrated nickel disilicide thermometers for high-temperature applications

In Proceedings of the 16th Micromechanics Europe Workshop (mme), September 4-6 — 2005, pp. 248-251

By Thorsteinsson, Sune1,2; Jensen, Søren1,2; Younes-Metzler, Osnat3; Quaade, Ulrich2; Hansen, Ole2,4

From

Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Department of Physics, Technical University of Denmark3

MicroNano Tribology and Modeling, Department of Micro- and Nanotechnology, Technical University of Denmark4

Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark5

Language: English
Year: 2005
Pages: 248-251
Proceedings: 16th Micromechanics Europe Workshop
Types: Conference paper
ORCIDs: Thorsteinsson, Sune and Hansen, Ole

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