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Conference paper

Micromechanical Pyrolytic Carbon String Resonators

By Kurek, Maksymilian1,2; Larsen, F. K.3; Larsen, Peter Emil1,2; Schmid, Silvan1,2; Boisen, Anja1,2; Keller, Stephan Sylvest1,4

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Nanoprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2

Technical University of Denmark3

Biomaterial Microsystems, Department of Micro- and Nanotechnology, Technical University of Denmark4

Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics, Department of Health Technology, Technical University of Denmark5

Language: English
Year: 2016
Proceedings: 13th International Workshop on Nanomechanical Sensing
Types: Conference paper
ORCIDs: Schmid, Silvan , Boisen, Anja and Keller, Stephan Sylvest

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