Preprint article · Journal article
Full-field hard x-ray microscopy with interdigitated silicon lenses
Department of Physics, Technical University of Denmark1
Neutrons and X-rays for Materials Physics, Department of Physics, Technical University of Denmark2
DTU Danchip, Technical University of Denmark3
Surface Physics and Catalysis, Department of Physics, Technical University of Denmark4
Department of Micro- and Nanotechnology, Technical University of Denmark5
Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark6
European Synchrotron Radiation Facility7
Full-field x-ray microscopy using x-ray objectives has become a mainstay of the biological and materials sciences. However, the inefficiency of existing objectives at x-ray energies above 15 keV has limited the technique to weakly absorbing or two-dimensional (2D) samples. Here, we show that significant gains in numerical aperture and spatial resolution may be possible at hard x-ray energies by using silicon-based optics comprising ‘interdigitated’ refractive silicon lenslets that alternate their focus between the horizontal and vertical directions.
By capitalizing on the nano-manufacturing processes available to silicon, we show that it is possible to overcome the inherent inefficiencies of silicon-based optics and interdigitated geometries. As a proof-of-concept of Si-based interdigitated objectives, we demonstrate a prototype interdigitated lens with a resolution of ≈255 nm at 17 keV.
Language: | English |
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Year: | 2016 |
Pages: | 460-464 |
ISSN: | 18730310 and 00304018 |
Types: | Preprint article and Journal article |
DOI: | 10.1016/j.optcom.2015.09.103 |
ORCIDs: | Stöhr, Frederik , Michael-Lindhard, Jonas , Jensen, Flemming , Hansen, Ole and Poulsen, Henning Friis |