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Conference paper

Tailoring a nanometer-scale fabrication process for silicon photonics

By Albrechtsen, Marcus1,2,3; Babar, Ali Nawaz1,2,3; Lahijani, Babak Vosoughi1,2,3; Shkondin, Evgeniy4; Bravo, Guillermo Arregui1,2,3; Sand, Jesper5; Jansen, Henri4,6; Stobbe, Søren1,2,3

From

Photonic Nanotechnology, Department of Electrical and Photonics Engineering, Technical University of Denmark1

NanoPhoton – Center for Nanophotonics, Centers, Technical University of Denmark2

Department of Electrical and Photonics Engineering, Technical University of Denmark3

National Centre for Nano Fabrication and Characterization, Technical University of Denmark4

Technical University of Denmark5

Nanofabrication, National Centre for Nano Fabrication and Characterization, Technical University of Denmark6

Language: English
Year: 2022
Proceedings: 48<sup>th</sup> International Conference on Micro and Nano Engineering
Types: Conference paper
ORCIDs: Albrechtsen, Marcus , Babar, Ali Nawaz , Lahijani, Babak Vosoughi , Shkondin, Evgeniy , Bravo, Guillermo Arregui , Jansen, Henri and Stobbe, Søren

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